Optical Lithography's Evolution, High Tech

Optical Lithography's Evolution

Continual Evolution of Optical Lithography - Optical litho progress Resolution, It\92s not just resolution more ITRS requests. Control requirements, i.e. CDU and Overlay, can individually limit the evolution of litho technology, Where the industry wants to go, Where we are now, How to keep it flying, Printing really small features, Negative Tone photoresist model using lines.

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Optical Lithography's Evolution,

Litho Evolution

Author: Steve Renwick (Senior) | Visits: 637 | Page Views: 2180

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Domain: High Tech Category: Semiconductors Subcategory: Lithography
Upload Date: 23rd-Aug-2012 Click On Above Link To See More

Reference: SEMICON West

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