Complementary Lithography at Insertion and Beyond - Complementary Lithography - View 2010. Cuts and Vias - Edge Placement Errors and Stochastic Control. Following capabilities have to be present at HVM NGL Insertion to support Yield and COO, Required Defect density/TPT, Required NGL/193i Overlay, Sophisticated OPC, Stochastics Suppression, If not controlled things can get out of hand in a hurry Overlay, OPC, Defects issues are known and pushed, Scope of Stochastic Suppression challenge.
