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The Future of DRAM: a mobile opportunity, High Tech, Page 18

The Future of DRAM: a mobile opportunity

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See entire paper: http://electronics.wesrch.com/pdfEL1SE1UU8UHDT
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ArF Immersion Lithography Mask Step Elpida A B C 50nm 8 8 8 8 40nm 5 8 8 8 30nm 4 10 (9) 9 ? 25nm 5 11 10 ? 20nm 7 (6) 12 (11) ? ? 18 Elpida Memory, Inc. 2011
 
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