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Thin-body FinFET Powers ICs To Beyond 10nm, High Tech, Page 19

Page: 19
See entire paper: http://electronics.wesrch.com/pdfEL1SE1OQNNDZN
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Page content:

2009 State-of-the-Art
5nm Body UTB-SOI

ETSOI, IBM
K. Cheng et al, IEDM, 2009

Other Names:
FDSOI
UTBB-SOI
19
Chenming Hu, February 2012

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